纳米三坐标测量机不确定度分析与精度设计
杨洪涛费业泰陈晓怀合肥工业大学仪器科学与光电工程学院,安徽合肥230009安徽理工大学机械工程系,安徽淮南232001摘要:利用现代精度设计理念设计纳米三坐标测量机的结构，选用高精度的零部件进行组装，解决了传统阿贝误差问题，通过研究现代精度保障理论和技术，进行纳米级水平的误差源全面分析，推导各个不确定度分量的计算公式，根据给定的精度指标设计合理的精度，提出所需检定仪器的具体技术指标，精度设计的结果满足了纳米三坐标测量机的测量精度要求．
关键词:纳米三坐标测量机阿贝误差全误差源分析不确定度精度设计
分类号:TG8TH7文献标识码：A文章编号：1000-582X（2006）08-0082-05栏目信息：机械·光电工程
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Keywords:Nano-CMM;Abbeerror;analysisoftotalerrorsource;uncertaintyaccuracydesign