ISO 14644 Cleanrooms and associated controlled environments 系列标准

  svw0936 ·  2008-09-02 21:27  ·  75141 次点击
ISO14644Cleanroomsandassociatedcontrolledenvironments系列标准,包括以下8个标准:
ISO14644-1-1999:Cleanroomsandassociatedcontrolledenvironmentspart1:Classificationofaircleanliness
ISO14644-2-2000:Cleanroomsandassociatedcontrolledenvironmentspart2:SpecificationsfortestingandmonitoringtoprovecontinuedcompliancewithISO14644-1
ISO14644-3-2005:Cleanroomsandassociatedcontrolledenvironmentspart3:Testmethods
ISO14644-4-2001:Cleanroomsandassociatedcontrolledenvironmentspart4:Design,constructionandstart-up
ISO14644-5-2004:Cleanroomsandassociatedcontrolledenvironmentspart5:Operations
ISO14644-6-2007:Cleanroomsandassociatedcontrolledenvironmentspart6:Vocabulary
ISO14644-7-2004:Cleanroomsandassociatedcontrolledenvironmentspart7:Separativedevices(cleanairhoods,gloveboxes,isolatorsandmini-environments)
ISO14644-8-2006:Cleanroomsandassociatedcontrolledenvironmentspart8:Classificationofairbornemolecularcontamination

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